
Table of Contents
Safety Guide .............................................................................................................................1
Caution in Handling ..................................................................................................................8
Names of the Parts ...................................................................................................................9
1. Checking the Product ....................................................................................................... 11
1.1 Components .........................................................................................................................................11
1.2 Related Operation Manuals for Each Controller Supported by This Product.......................................11
1.3 How to Read the Model Nameplate..................................................................................................... 12
1.4 How to Read the Model Number ......................................................................................................... 13
2. Specification .....................................................................................................................14
2.1 Maximum Speed.................................................................................................................................. 14
2.2 Acceleration/Deceleration, Payload Capacity and Rated Thrust......................................................... 16
2.3 Driving System/Position Detector ........................................................................................................ 19
2.4 Positioning Preciseness....................................................................................................................... 20
2.5 Allowable Load Moment of the Actuator.............................................................................................. 21
3. Life....................................................................................................................................23
4. Installation and Storage/Preservation Environment ..........................................................24
4.1 Installation Environment ...................................................................................................................... 24
4.2 Storage/Preservation Environment...................................................................................................... 24
5. Transport ..........................................................................................................................25
5.1 Handling a Single Axis ......................................................................................................................... 25
5.1.1 Handling a Package............................................................................................................. 25
5.1.2 Handling an Actuator after Unpacking ................................................................................. 25
5.2 Handling an Cartesian Robot (ICS) ..................................................................................................... 27
5.2.1 Handling a Package............................................................................................................. 27
5.2.2 Handling an Actuator after Unpacking ................................................................................. 27
5.3 Handling an Actuator Assembled to a Mechanical System ................................................................. 28
6. Installation ........................................................................................................................29
6.1 Installation Orientations ....................................................................................................................... 29
6.2 Installing the Actuator .......................................................................................................................... 31
6.2.1 Installation Method............................................................................................................... 31
6.2.2 Preciseness of the Installation Surface ............................................................................... 35
6.3 Installing the Load on the Slider .......................................................................................................... 37
6.4 Using T-slots ........................................................................................................................................ 40
6.5 Suctioning for Clean Room Application ............................................................................................... 41
7. Connecting the Controller.................................................................................................42
7.1 Wiring................................................................................................................................................... 42
8. Operating Conditions........................................................................................................45
8.1 Duty Ratio during Continuous Operation............................................................................................. 45
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